Our single-sided PCC-300® PVA brush scrubber and tribometer is suitable for cleaning coupon-sized blanket and patterned wafers up to 300 mm. Based on the robust, and time-tested Struers Labopol-30® platform and employing most types of flow-through-the-core PVA brushes, the system is equipped with a 1,000 Hz shear force sensor, adjustable brush downforce, automated brush and wafer velocity controllers, up to 2 independent computer-controlled chemical delivery systems, a separate high-flow rinse water line, and a myriad of other standard features.
Through-the-core flow of cleaning solution, as well as direct application above the wafer.
Shear force sensor tied to big data analytics software.
Two built-in, 20-liter cleaning solution delivery tanks complete with peristaltic pumps.
Coupon-sized all the way up to 300-mm wafers.
Smallest footprint in the industry.
Easy to install with no raised-floor requirements.
Built in the USA, the system uses our FSX® proprietary force acquisition and data analysis system, with a user-friendly GUI that includes menus for calibration, data acquisition, waveform analysis, velocity vector analysis, and spectral analysis.
Optional equipment includes our latest 240 Hz camera and non-flickering LED illuminating system for real-time videography. This is an indispensable tool for studying fluid flow around the brush and on the wafer as a function of tool kinematics, pressure, flow rate, and nodule design. We also provide an enclosed, sealed environmental chamber (with a 10 cm OD standard tool exhaust port) featuring an integrated heavy table and a fold-away PC workstation.
The PCC-300® is intended for use in research and development environments (such as universities, research institutes, post-CMP cleaning consumables suppliers, and end-users). It has proven crucial for performing functional tests to understand the extent of mechanical forces imparted on the wafer surface by brush mechanical properties, applied downforce, tool kinematics, and myriad cleaning solution additives.
By offering a standardized, affordable post-CMP PVA scrubber and tribometer to the CMP and silicon polishing communities, we are accelerating the acquisition and sharing of fundamental knowledge among stakeholders on a common, robust experimental platform. We have sold 8 units thus far, all paired with our polishers.
Please refer to the PCC-300® and Heavy Table brochures above for details on the features and capabilities of our tool, as well as our latest product specifications. Please contact us with any questions.
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