This is the first of three business units (BUs) within Araca. The other two are “Services”, and “Licensing”.

The main add-on products within this BU are the Slurry Injection System (SIS®), and Flucto-CMP®. These systems are designed to improve module productivity, and boost polishing performance (removal rates, selectivities, vibration, dishing-erosion, and wafer-level defects), while reducing slurry consumption and COO. They are intended for use in high-volume manufacturing (HVM) and are compatible with all major OEM polishers.

In an exclusive partnership with our corporate investor, Fujikoshi Machinery Corporation located in Nagano (Japan), we co-manufacture state-of-the-art polishers and tribometers capable of real-time measurement, analysis, correlation and reporting of shear force and down force. The systems are also capable of reporting pad surface temperature in real-time. The tools are powered by our proprietary high-frequency data acquisition and analysis systems, along with a superb GUI including calibration, waveform analysis, velocity vector analysis, and spectral analysis menus. The systems are intended for use in research and development environments at universities, research institutes and consumables suppliers worldwide.

We also manufacture a single-sided PVA brush scrubber and tribometer to go with the above polishers. Able to accommodate most types of 300 mm flow-through-the-core brushes, the system is equipped with a high-frequency shear force sensor, adjustable brush downforce, automated brush, and wafer velocity controllers, two independent computer-controlled chemical delivery systems, a separate high-flow rinse water line, and many other standard features. Built mostly in the USA, it is powered by our proprietary force acquisition and data analysis system with similar features and intended applications as above.

Finally, we offer a high-speed (240 Hz) camera and non-flickering LED illuminating system (VID-300^®) for real-time videography. Complete with a user-friendly image analysis system and a PC, this is an indispensable tool for studying fluid flow on the polishing pad, and near the retaining ring, as well as around the brush as a function of tool kinematics, pressure, flow rate, groove design, and nodule shape. The system comes as an option with our polishers and scrubbers, but it can also be installed on most OEM tools where the study of fluid dynamics is important.

Please refer to the Araca Product and Service Brochure for details.

Please contact us with any questions.