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Jun 21, 2015

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CMP at 450 mm: Slurry use and thermal predictions. How did we do?

CMP at 450 mm: Slurry use and thermal predictions. How did we do?

Posted in : Uncategorized on by : Len Borucki
  • The Solid State Technology Article In the December 2009 issue of Solid State Technology, along with my co-authors Ara Philipossian of the University of Arizona and Araca Incorporated, and Michael Goldstein of Intel, I published an article projecting what might ..